针对过盈微装配中弱微零件易损的问题，以激光惯性约束聚变（Inertial Confinement Fusion，ICF）研究中微靶关键部件—冷冻罩（Thermomechanical Package，TMP）组件装配作为研究对象，开展弱微零件过盈装配方法研究。首先，针对装配空间狭小及存在视觉遮挡，导致难以实现装配过程中硅臂形变检测的问题，提出了基于灰度变化的形变检测方法并建立了小爪灰度—形变模型；然后，针对受到显微视觉检测精度影响，硅臂与套筒微小位姿偏差不易检测的问题，基于硅臂受力变形情况分析，提出了硅臂与套筒位姿偏差定性判断方法，实现两者微小位姿偏差的检测；最后，基于零件灰度变化及几何分析，提出了微装配过程位姿偏差定量计算方法并设计了过盈装配控制策略。实验结果证明了所提方法的有效性，并且实现了过盈20~26 μm的TMP组件无损装配。该方法适用于微机电系统制造中微轴孔过盈装配。

The designs of inertial confinement fusion (ICF) targets, which field on ShenGuang III, are becoming more complex and more stringent in terms of assembly precision. A key specification of these targets is the spatial angle alignment accuracy. To meet these needs, we present a new spatial angle assembly method, using target part’s 3D model-based dual orthogonal camera vision, which is better suited for the flexible automation of target assembly processes. The two-hands structure micromanipulate system and dual orthogonal structure visual feedback system were investigated by considering the kinematics, spatial angle measuring, and motion control in an integrated way. In this paper, we discuss the measurement accuracy of spatial angle assembly method, which compared the real-time image acquisition with the redrawing 2D projection. The result shows that the assembly method proposed is very effective and meets the requirements of angle assembly accuracy, which is less than $1^{\circ }$. Also, this work is expected to contribute greatly to the advancement of other target microassembly equipments.